Tool decontamination expertise and services
Working to meet your project goals, our expert teams provide a high quality, customized tool decontamination service.
Rigorous sampling & testing
Every project undergoes a complete and thorough inspection and includes a detailed tool traveler and report packet upon completion of the decontamination sequence. Where needed, we can also provide analysis for arsenic, copper, lead, boron, and phosphorous.
Full-panel corrosives testing
Fluoride contaminants detection
pH testing and reporting
We are specialists in decontaminating a variety of tools
We have decades of experience in offering fully documented tool decontamination to ion implanters, chemical mechanical planar systems (CMP), chemical vapor deposition systems (CVD), physical vapor deposition systems (PVD), gas control panels, metrology systems, furnaces, and steppers.